Vibration Sensors
Piezo-resistive sensor
- A piezo-resistive sensor has a stable structure composed on a silicon chip created by the micromachining and semiconductor production technology. A mass and a beam on which a set of the piezo-resisters are created on a silicon chip. A set of electrical bridged is formed by such piezo-resistive resisters to generate signals proportional to the applied acceleration.
Features
- ■ Measurements are possible over the wide frequency range covering down from the ultra low up to the high frequency as of several kHz.
- ■ Compact and light weight
- ■ High sensitivity
- ■ Highly acceleration resistant
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[ Frequency response ]
The upper usable frequency depends on the characteristics of dampers composed in the sensor itself. The lower usable frequency goes down to DC.
Product lineup
Outward dimension PDF■ Specifications
| Sensitivity | 100 mV/ (m/s2) |
|---|---|
| Natural frequency | > 450 Hz |
| Frequency range | DC to 100 Hz |
| Maximum measurable acceleration | 20 m/s2 |
| Maximum allowable acceleration | 300 m/s2 |
| Operating temperature range | -10 to +70 ﾟC |
| Weight | 200 g |